Inventor · disambiguated record
Makoto Kikukawa
Also filed as: KIKUKAWA MAKOTO
7 granted patents·3 pending applications·72 citations·filing 2000–2003
84Inventor score
Top patents by PatentIndex Score
10 records- 0179US6302600B1Apparatus for treating surface of boardsNAGASE & CO LTD·Filed 2000·Granted Oct 16, 2001·26 cites·24 claims
- 0272US6623183B2Developer producing equipment and methodNAGASE & CO LTD·Filed 2002·Granted Sep 23, 2003·17 cites·21 claims
- 0367US6752545B2Alkali-based treating liquid, treating liquid adjusting method and equipment, treating liquid supplying method and equipmentNAGASE & CO LTD·Filed 2002·Granted Jun 22, 2004·10 cites·10 claims
- 0461US6588927B2Purified developer producing equipment and methodNAGASE & CO LTD·Filed 2002·Granted Jul 8, 2003·10 cites·15 claims
- 0548US7109037B2Water-based resist stripping liquid management apparatus and water-based resist stripping liquid management methodNAGASE CMS TECHNOLOGY CO LTD·Filed 2002·Granted Sep 19, 2006·4 cites·1 claims
- 0645US6875359B2Developer waste liquid regenerating apparatus and methodNAGASE & CO LTD·Filed 2002·Granted Apr 5, 2005·3 cites·6 claims
- 0742US7101517B2Processing solution preparation and supply method and apparatusNAGASE CMS TECHNOLOGY CO LTD·Filed 2003·Granted Sep 5, 2006·2 cites·6 claims
- 0833US2004011463A1Resist stripping equipmentFiled 2003·Application pending·0 cites
- 0932US2002197079A1Non-water-based resist stripping liquid management apparatus and non-water-based resist stripping liquid management methodFiled 2002·Application pending·0 cites
- 1030US2003141246A1Regenerating apparatus and method for resist stripping waste liquidsFiled 2002·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →