Inventor · disambiguated record

Tomoyuki Shitaku

Also filed as: SHITAKU TOMOYUKI

1 granted patent·8 citations·filing 2002–2002

29Inventor score

Technology areasH10P

Files withRORZE CORP1

Top patents by PatentIndex Score

1 record

0148US7315373B2Wafer positioning method and device, wafer process system, and wafer seat rotation axis positioning method for wafer positioning deviceRORZE CORP·Filed 2002·Granted Jan 1, 2008·8 cites·16 claims

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