Inventor · disambiguated record
Renzo Maccagnan
Also filed as: MACCAGNAN RENZO
8 granted patents·1 pending application·650 citations·filing 1996–2001
90Inventor score
Files withIBM8
Top patents by PatentIndex Score
9 records- 0195US6363294B1Method and system for semiconductor wafer fabrication process real-time in-situ interactive supervisionIBM·Filed 1998·Granted Mar 26, 2002·491 cites·7 claims
- 0270US6716764B1Method of forming first level of metallization in DRAM chipsIBM·Filed 2000·Granted Apr 6, 2004·24 cites·13 claims
- 0368US6417072B2Method of forming STI oxide regions and alignment marks in a semiconductor structure with one masking stepIBM·Filed 2001·Granted Jul 9, 2002·20 cites·11 claims
- 0464US6281068B1Method for buried plate formation in deep trench capacitorsIBM·Filed 1999·Granted Aug 28, 2001·36 cites·6 claims
- 0563US5874345AMethod for planarizing TEOS SiO2 filled shallow isolation trenchesIBM·Filed 1996·Granted Feb 23, 1999·32 cites·16 claims
- 0660US5930585ACollar etch method to improve polysilicon strap integrity in DRAM chipsIBM·Filed 1996·Granted Jul 27, 1999·21 cites·7 claims
- 0753US6297089B1Method of forming buried straps in DRAMsIBM·Filed 1999·Granted Oct 2, 2001·14 cites·6 claims
- 0844US6258727B1Method of forming metal lands at the M0 level with a non selective chemistryIBM·Filed 1999·Granted Jul 10, 2001·12 cites·7 claims
- 0921US2001001729A1Method of plasma etching doped polysilicon layers with uniform etch ratesFiled 1998·Application pending·0 cites
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