Inventor · disambiguated record
Koki Nishimuko
Also filed as: NISHIMUKO KOKI
5 granted patents·117 citations·filing 1999–2009
83Inventor score
Technology areasH10P
Top patents by PatentIndex Score
5 records- 0194US7780366B2Resist pattern forming methodTOKYO ELECTRON LTD·Filed 2007·Granted Aug 24, 2010·22 cites·32 claims
- 0291US7488127B2Resist pattern forming apparatus and method thereofTOKYO ELECTRON LTD·Filed 2005·Granted Feb 10, 2009·16 cites·19 claims
- 0384US6984477B2Resist pattern forming apparatus and method thereofTOKYO ELECTRON LTD·Filed 2001·Granted Jan 10, 2006·25 cites·12 claims
- 0477US6281962B1Processing apparatus for coating substrate with resist and developing exposed resist including inspection equipment for inspecting substrate and processing method thereofTOKYO ELECTRON LTD·Filed 1999·Granted Aug 28, 2001·52 cites·16 claims
- 0568US8231285B2Substrate processing method and apparatusOGATA KUNIE·Filed 2009·Granted Jul 31, 2012·2 cites·34 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →