Inventor · disambiguated record

Diane C. Vogel

Also filed as: VOGEL DIANE C

2 granted patents·442 citations·filing 1980–1981

71Inventor score

Technology areasH10P

Files withBRANSON INT PLASMA2

Top patents by PatentIndex Score

2 records

0193US4324611AProcess and gas mixture for etching silicon dioxide and silicon nitrideBRANSON INT PLASMA·Filed 1980·Granted Apr 13, 1982·410 cites·13 claims
0266US4380488AProcess and gas mixture for etching aluminumBRANSON INT PLASMA·Filed 1981·Granted Apr 19, 1983·32 cites·11 claims

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