Inventor · disambiguated record
Nobuyuki Sata
Also filed as: SATA NOBUYUKI
18 granted patents·2 pending applications·530 citations·filing 1989–2024
95Inventor score
Top patents by PatentIndex Score
20 records- 0190US6222161B1Heat treatment apparatusTOKYO ELECTRON LTD·Filed 1999·Granted Apr 24, 2001·84 cites·36 claims
- 0290US5022498AMethod and apparatus for controlling a group of elevators using fuzzy rulesFUJITEC KK·Filed 1989·Granted Jun 11, 1991·50 cites·18 claims
- 0388US6291800B1Heat treatment apparatus and substrate processing systemTOKYO ELECTRON LTD·Filed 1999·Granted Sep 18, 2001·86 cites·18 claims
- 0487US6380518B2Heat treatment apparatus and substrate processing systemTOKYO ELECTRON LTD·Filed 2001·Granted Apr 30, 2002·36 cites·11 claims
- 0586US6191394B1Heat treating apparatusTOKYO ELECTRON LTD·Filed 1999·Granted Feb 20, 2001·85 cites·35 claims
- 0685US6450803B2Heat treatment apparatusTOKYO ELECTRON LTD·Filed 2001·Granted Sep 17, 2002·26 cites·11 claims
- 0780US8014895B2Temperature setting method of heat processing plate, temperature setting apparatus of heat processing plate, program, and computer-readable recording medium recording program thereonTOKYO ELECTRON LTD·Filed 2005·Granted Sep 6, 2011·6 cites·11 claims
- 0879US6229116B1Heat treatment apparatusTOKYO ELECTRON LTD·Filed 1999·Granted May 8, 2001·57 cites·16 claims
- 0974US7977609B2Temperature measuring device using oscillating frequency signalsTOKYO ELECTRON LTD·Filed 2006·Granted Jul 12, 2011·4 cites·8 claims
- 1069US8874254B2Temperature setting method of heat processing plate, temperature setting apparatus of heat processing plate, program, and computer-readable recording medium recording program thereonIWANAGA SHUJI·Filed 2011·Granted Oct 28, 2014·2 cites·14 claims
- 1167USRE40052EHeat treatment apparatusTOKYO ELECTRON LTD·Filed 2003·Granted Feb 12, 2008·8 cites·36 claims
- 1267US7049553B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2004·Granted May 23, 2006·12 cites·23 claims
- 1362US5517067AMiniature D.C. motor provided with rotation detectorMABUCHI MOTOR CO·Filed 1993·Granted May 14, 1996·26 cites·23 claims
- 1460US7316515B2Liquid processing apparatus processing a substrate surface with a processing liquid, liquid processing method, and liquid condition detection apparatus detecting fluctuation of the processing liquidTOKYO ELECTRON LTD·Filed 2005·Granted Jan 8, 2008·1 cites·16 claims
- 1559US2024385538A1Information collection system, inspection substrate, and information collection methodTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 1656US7241633B2Heat treatment apparatus and heat treatment methodTOKYO ELECTRON LTD·Filed 2004·Granted Jul 10, 2007·5 cites·13 claims
- 1754US5079468AMiniature motor with revolution-detecting generatorMABUCHI MOTOR CO·Filed 1990·Granted Jan 7, 1992·21 cites·6 claims
- 1843US5013946AMiniature motor with a frequency generatorMABUCHI MOTOR CO·Filed 1989·Granted May 7, 1991·11 cites·6 claims
- 1942US5070269AMiniature motor having a frequency generatorMABUCHI MOTOR CO·Filed 1990·Granted Dec 3, 1991·10 cites·5 claims
- 2035US2004007929A1Miniature motorFiled 2003·Application pending·0 cites
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