Inventor
ISHIBASHI KIYOTAKA
JP31 patents
⚠️ This page may combine multiple inventors who share the name “ISHIBASHI KIYOTAKA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
14 patentsUS9418822B2Aug 16, 2016
Plasma processing apparatus, plasma processing method and high frequency generator
TOKYO ELECTRON LTD29 citations93
US7469654B2Dec 30, 2008
Plasma processing device
TOKYO ELECTRON LTD22 citations92
US9767993B2Sep 19, 2017
Plasma processing apparatus
TOKYO ELECTRON LTD18 citations84
US8372200B2Feb 12, 2013
Shower plate, method for manufacturing the shower plate, plasma processing apparatus using the shower plate, plasma processing method and electronic device manufacturing method
TOKYO ELECTRON LTD14 citations84
US7930992B2Apr 26, 2011
Plasma processing equipment
TOKYO ELECTRON LTD9 citations84
US8925351B2Jan 6, 2015
Manufacturing method of top plate of plasma processing apparatus
TOKYO ELECTRON LTD5 citations72
US10388557B2Aug 20, 2019
Placing bed structure, treating apparatus using the structure, and method for using the apparatus
TOKYO ELECTRON LTD1 citations62
US8343308B2Jan 1, 2013
Ceiling plate and plasma process apparatus
TOKYO ELECTRON LTD4 citations61
US11692269B2Jul 4, 2023
Plasma processing apparatus
TOKYO ELECTRON LTD0 citations52
US7940009B2May 10, 2011
Plasma processing apparatus
TOKYO ELECTRON LTD0 citations52
US7828927B2Nov 9, 2010
Plasma processing device
TOKYO ELECTRON LTD1 citations52
US9767994B2Sep 19, 2017
Shower plate sintered integrally with gas release hole member and method for manufacturing the same
TOKYO ELECTRON LTD0 citations51
US7779783B2Aug 24, 2010
Plasma processing device
TOKYO ELECTRON LTD0 citations42
US10570512B2Feb 25, 2020
Substrate processing apparatus
TOKYO ELECTRON LTD0 citations41
ISHIBASHI KIYOTAKA
5 patentsUS9237638B2Jan 12, 2016
Plasma processing apparatus and substrate processing method
ISHIBASHI KIYOTAKA4 citations72
US8267042B2Sep 18, 2012
Plasma processing apparatus and plasma processing method
ISHIBASHI KIYOTAKA5 citations61
US8069704B2Dec 6, 2011
Sealing structure of plasma processing apparatus, sealing method, and plasma processing apparatus including the sealing structure
ISHIBASHI KIYOTAKA2 citations55
US9670584B2Jun 6, 2017
Plasma processing device
ISHIBASHI KIYOTAKA0 citations40
US8267040B2Sep 18, 2012
Plasma processing apparatus and plasma processing method
ISHIBASHI KIYOTAKA0 citations37
KOBE STEEL LTD
4 patentsUS4940015AJul 10, 1990
Plasma reactor for diamond synthesis
KOBE STEEL LTD109 citations95
US5063294ANov 5, 1991
Converged ion beam apparatus
KOBE STEEL LTD95 citations94
US5280252AJan 18, 1994
Charged particle accelerator
KOBE STEEL LTD33 citations90
US5350920ASep 27, 1994
Ion beam analyzing apparatus
KOBE STEEL LTD12 citations70
TIAN CAIZHONG
3 patentsUS8967080B2Mar 3, 2015
Top plate of microwave plasma processing apparatus, plasma processing apparatus and plasma processing method
TIAN CAIZHONG10 citations81
US8273210B2Sep 25, 2012
Plasma processing apparatus and method for adjusting plasma density distribution
TIAN CAIZHONG0 citations49
US8387560B2Mar 5, 2013
Plasma processing unit
TIAN CAIZHONG0 citations39