Inventor · disambiguated record
Kenichi Sugita
Also filed as: SUGITA KENICHI
7 granted patents·4 pending applications·21 citations·filing 1998–2022
80Inventor score
Files withEBARA CORP3TAKAHASHI NOBUYUKI2TOSHIBA KK2HITACHI INFORMATION & TELECOMMUNICATION ENG LTD1ISHIBASHI TOMOATSU1
Top patents by PatentIndex Score
11 records- 0188US10008380B2Substrate drying apparatus, substrate drying method and control programEBARA CORP·Filed 2014·Granted Jun 26, 2018·7 cites·26 claims
- 0284US8769842B2Substrate drying apparatus, substrate drying method and control programEBARA CORP·Filed 2013·Granted Jul 8, 2014·5 cites·16 claims
- 0382US8087419B2Substrate holding rotating mechanism, and substrate processing apparatusKANEKO HIROYUKI·Filed 2011·Granted Jan 3, 2012·5 cites·15 claims
- 0472US7938130B2Substrate holding rotating mechanism, and substrate processing apparatusEBARA CORP·Filed 2007·Granted May 10, 2011·3 cites·10 claims
- 0556US12372997B2Processing device and error detection methodHITACHI INFORMATION & TELECOMMUNICATION ENG LTD·Filed 2022·Granted Jul 29, 2025·0 cites·9 claims
- 0648US2009067959A1Substrate processing apparatus, substrate transfer apparatus, substrate clamp apparatus, and chemical liquid treatment apparatusTAKAHASHI NOBUYUKI·Filed 2007·Application pending·0 cites
- 0747US10629717B2High power deviceTOSHIBA KK·Filed 2018·Granted Apr 21, 2020·0 cites·9 claims
- 0847US2011289795A1Substrate drying apparatus, substrate drying method and control programISHIBASHI TOMOATSU·Filed 2011·Application pending·0 cites
- 0946US2012193506A1Substrate processing apparatus, substrate transfer apparatus, substrate clamp apparatus, and chemical liquid treatment apparatusTAKAHASHI NOBUYUKI·Filed 2012·Application pending·0 cites
- 1036US2018286973A1High frequency deviceTOSHIBA KK·Filed 2018·Application pending·0 cites
- 1130US6143732ASesquiterpene derivativesSHIONOGI & CO·Filed 1998·Granted Nov 7, 2000·1 cites·10 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →