Inventor · disambiguated record
Cheng-Qun Gui
Also filed as: GUI CHENG · GUI CHENG-QUN
51 granted patents·7 pending applications·539 citations·filing 2002–2013
98Inventor score
Top patents by PatentIndex Score
58 records- 0197US9335638B2Lithographic apparatus, programmable patterning device and lithographic methodASML NETHERLANDS BV·Filed 2013·Granted May 10, 2016·19 cites·24 claims
- 0295US6967711B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Nov 22, 2005·60 cites·7 claims
- 0394US8531648B2Lithographic apparatus, programmable patterning device and lithographic methodDE JAGER PIETER WILLEM HERMAN·Filed 2009·Granted Sep 10, 2013·25 cites·34 claims
- 0493US6768539B2Lithographic apparatusASML NETHERLANDS BV·Filed 2002·Granted Jul 27, 2004·66 cites·16 claims
- 0592US7116402B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Oct 3, 2006·40 cites·7 claims
- 0692US7081947B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Jul 25, 2006·38 cites·23 claims
- 0788US7576834B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2008·Granted Aug 18, 2009·7 cites·26 claims
- 0888US7158215B2Large field of view protection optical system with aberration correctability for flat panel displaysASML HOLDING NV·Filed 2004·Granted Jan 2, 2007·27 cites·77 claims
- 0987US7158208B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Jan 2, 2007·31 cites·15 claims
- 1086US6936385B2Calibration methods, calibration substrates, lithographic apparatus and device manufacturing methodsASML NETHERLANDS BV·Filed 2003·Granted Aug 30, 2005·37 cites·26 claims
- 1185US7643128B2Large field of view projection optical system with aberration correctabilityASML HOLDING NV·Filed 2006·Granted Jan 5, 2010·6 cites·26 claims
- 1285US7385675B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Jun 10, 2008·18 cites·29 claims
- 1379US7388663B2Optical position assessment apparatus and methodASML NETHERLANDS BV·Filed 2004·Granted Jun 17, 2008·16 cites·17 claims
- 1478US7133118B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Nov 7, 2006·12 cites·17 claims
- 1577US7084955B2Lithographic apparatusASML NETHERLANDS BV·Filed 2004·Granted Aug 1, 2006·11 cites·16 claims
- 1675US8675175B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2013·Granted Mar 18, 2014·1 cites·15 claims
- 1775US7324186B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Jan 29, 2008·3 cites·18 claims
- 1875US7064807B2Lithographic apparatusASML NETHERLANDS BV·Filed 2004·Granted Jun 20, 2006·10 cites·42 claims
- 1973US7522266B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Apr 21, 2009·2 cites·6 claims
- 2073US7468291B2Method and apparatus for locating and/or forming bumpsASML NETHERLANDS BV·Filed 2006·Granted Dec 23, 2008·7 cites·18 claims
- 2173US7184124B2Lithographic apparatus having an adjustable projection system and device manufacturing methodASML HOLDING NV·Filed 2004·Granted Feb 27, 2007·13 cites·24 claims
- 2272US7440081B2Lithographic apparatus, device manufacturing method, and substrate tableASML NETHERLANDS BV·Filed 2004·Granted Oct 21, 2008·11 cites·46 claims
- 2372US7202939B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Apr 10, 2007·9 cites·18 claims
- 2470USRE43515ELithographic apparatus and device manufacturing methodGUI CHENG-QUN·Filed 2008·Granted Jul 17, 2012·2 cites·8 claims
- 2569US7879514B2Lithographic method and patterning deviceASML NETHERLANDS BV·Filed 2006·Granted Feb 1, 2011·3 cites·15 claims
- 2668US8395755B2Lithographic apparatus and device manufacturing methodGEORGE RICHARD ALEXANDER·Filed 2009·Granted Mar 12, 2013·2 cites·16 claims
- 2768US7561251B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Jul 14, 2009·10 cites·18 claims
- 2867US8029973B2Lithographic method and carrier substrateASML NETHERLANDS BV·Filed 2008·Granted Oct 4, 2011·2 cites·16 claims
- 2965US8390787B2Lithographic apparatus and device manufacturing methodGUI CHENG-QUN·Filed 2007·Granted Mar 5, 2013·2 cites·22 claims
- 3065US7477403B2Optical position assessment apparatus and methodASML NETHERLANDS BV·Filed 2004·Granted Jan 13, 2009·8 cites·44 claims
- 3165US7251020B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Jul 31, 2007·7 cites·19 claims
- 3261US7190434B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Mar 13, 2007·5 cites·28 claims
- 3360US7333177B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Feb 19, 2008·5 cites·63 claims
- 3459US7911586B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2009·Granted Mar 22, 2011·0 cites·9 claims
- 3558USRE45284ELithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2013·Granted Dec 9, 2014·0 cites·13 claims
- 3658US8576374B2Lithographic apparatus and methodBEST KEITH FRANK·Filed 2009·Granted Nov 5, 2013·3 cites·6 claims
- 3758US7256865B2Methods and apparatuses for applying wafer-alignment marksASML HOLDING NV·Filed 2003·Granted Aug 14, 2007·4 cites·10 claims
- 3857US7253884B2Method of calibrating a lithographic apparatus, alignment method, computer program, data storage medium, lithographic apparatus, and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Aug 7, 2007·5 cites·24 claims
- 3956US6914664B2Lithographic apparatus, alignment method and device manufacturing methodASML NETHERLANDS BV·Filed 2003·Granted Jul 5, 2005·5 cites·25 claims
- 4055US8502954B2Lithographic apparatus and device manufacturing methodVAN DER FELTZ GUSTAAF WILLEM·Filed 2009·Granted Aug 6, 2013·1 cites·19 claims
- 4154US7428040B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2007·Granted Sep 23, 2008·0 cites·24 claims
- 4251US7684009B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Mar 23, 2010·0 cites·21 claims
- 4351US2007196746A1Methods and apparatuses for applying wafer-alignment marksCONSOLINI JOSEPH·Filed 2007·Application pending·0 cites
- 4450US8383325B2Lithographic apparatus and methodASML NETHERLANDS BV·Filed 2009·Granted Feb 26, 2013·0 cites·7 claims
- 4548US7531040B2Resist recovery methodASML HOLDINGS N V·Filed 2003·Granted May 12, 2009·2 cites·14 claims
- 4647US7609362B2Scanning lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Oct 27, 2009·2 cites·21 claims
- 4747US7193231B2Alignment tool, a lithographic apparatus, an alignment method, a device manufacturing method and device manufactured therebyASML NETHERLANDS BV·Filed 2003·Granted Mar 20, 2007·1 cites·23 claims
- 4844US2008083818A1Measuring the bonding of bonded substratesASML NETHERLANDS BV·Filed 2006·Application pending·0 cites
- 4944US2005243298A1Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Application pending·0 cites
- 5043US8982318B2Lithographic apparatus and methodIOSAD NIKOLAY NIKOLAEVICH·Filed 2009·Granted Mar 17, 2015·0 cites·20 claims
Showing the top 50 of 58 patent records by PatentIndex Score.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →