Inventor · disambiguated record
Toshikazu Nakazawa
Also filed as: NAKAZAWA TOSHIKAZU
8 granted patents·1 pending application·14 citations·filing 2009–2018
79Inventor score
Top patents by PatentIndex Score
9 records- 0182US9607868B2Substrate heat treatment apparatusCANON ANELVA CORP·Filed 2013·Granted Mar 28, 2017·6 cites·3 claims
- 0276US9997339B2Sputtering apparatus and substrate processing apparatusCANON ANELVA CORP·Filed 2015·Granted Jun 12, 2018·2 cites·9 claims
- 0373US9822450B2Substrate processing apparatusCANON ANELVA CORP·Filed 2014·Granted Nov 21, 2017·1 cites·19 claims
- 0472US10062551B2Sputtering apparatus and substrate processing apparatusCANON ANELVA CORP·Filed 2015·Granted Aug 28, 2018·2 cites·16 claims
- 0572US9127355B2Substrate processing apparatusCANON ANELVA CORP·Filed 2012·Granted Sep 8, 2015·3 cites·4 claims
- 0667US10615012B2Sputtering apparatus and substrate processing apparatusCANON ANELVA CORP·Filed 2018·Granted Apr 7, 2020·0 cites·5 claims
- 0739US2009320948A1Stacked load lock chamber and substrate processing apparatus including the sameCANON ANELVA CORP·Filed 2009·Application pending·0 cites
- 0831US9194038B2Thin film forming apparatus, thin film forming method, and shield componentEGAMI AKIHIRO·Filed 2010·Granted Nov 24, 2015·0 cites·7 claims
- 0930US9245785B2Substrate processing apparatusTASHIRO YUKIHITO·Filed 2012·Granted Jan 26, 2016·0 cites·3 claims
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