Inventor · disambiguated record
Michiya Naito
Also filed as: NAITO MICHIYA
3 granted patents·1 citations·filing 2015–2017
47Inventor score
Files withTOYO GOSEI CO LTD3
Top patents by PatentIndex Score
3 records- 0170US11347147B2Metal-containing onium salt compound, photodegradable base, resist composition, and method for manufacturing device using said resist compositionTOYO GOSEI CO LTD·Filed 2017·Granted May 31, 2022·1 cites·10 claims
- 0250US9850334B2Manufacturing method of polymerTOYO GOSEI CO LTD·Filed 2015·Granted Dec 26, 2017·0 cites·19 claims
- 0343US11048166B2Photosensitive compound, photoacid generator and resist composition containing the photosensitive compound, and method for manufacturing device using the resist compositionTOYO GOSEI CO LTD·Filed 2017·Granted Jun 29, 2021·0 cites·5 claims
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