Inventor · disambiguated record

Robert Duncan Morton

Also filed as: MORTON ROBERT DUNCAN

1 granted patent·0 citations·filing 2004–2004

3Inventor score

Technology areasG03F

Files withDIRKSEN PETER1

Top patents by PatentIndex Score

1 record

0134US8067147B2Removable pellicle for immersion lithographyDIRKSEN PETER·Filed 2004·Granted Nov 29, 2011·0 cites·17 claims

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