Inventor · disambiguated record
Robert Soper
Also filed as: SOPER ROBERT · SOPER ROBERT A · SOPER ROBERT ALAN
7 granted patents·2 pending applications·175 citations·filing 2002–2009
85Inventor score
Files withTEXAS INSTRUMENTS INC9
Top patents by PatentIndex Score
9 records- 0195US6787469B2Double pattern and etch of poly with hard maskTEXAS INSTRUMENTS INC·Filed 2002·Granted Sep 7, 2004·99 cites·23 claims
- 0291US6764795B2Method and system for mask pattern correctionTEXAS INSTRUMENTS INC·Filed 2002·Granted Jul 20, 2004·46 cites·27 claims
- 0389US7512928B2Sub-resolution assist feature to improve symmetry for contact hole lithographyTEXAS INSTRUMENTS INC·Filed 2005·Granted Mar 31, 2009·17 cites·7 claims
- 0476US7987436B2Sub-resolution assist feature to improve symmetry for contact hole lithographyTEXAS INSTRUMENTS INC·Filed 2009·Granted Jul 26, 2011·5 cites·7 claims
- 0554US6785878B2Correcting a mask pattern using multiple correction gridsTEXAS INSTRUMENTS INC·Filed 2002·Granted Aug 31, 2004·4 cites·20 claims
- 0649US7341808B2Method and system for contiguous proximity correction for semiconductor masksTEXAS INSTRUMENTS INC·Filed 2004·Granted Mar 11, 2008·2 cites·20 claims
- 0747US6807661B2Correcting a mask pattern using a clip maskTEXAS INSTRUMENTS INC·Filed 2003·Granted Oct 19, 2004·2 cites·23 claims
- 0842US2007231710A1Method and system for forming a photomask patternTEXAS INSTRUMENTS INC·Filed 2006·Application pending·0 cites
- 0939US2007082425A1Using a center pole illumination scheme to improve symmetry for contact hole lithographyTEXAS INSTRUMENTS INC·Filed 2005·Application pending·0 cites
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