Inventor · disambiguated record
Tzu-Shin Chen
Also filed as: CHEN TZU-SHIN
6 granted patents·3 pending applications·38 citations·filing 2002–2018
80Inventor score
Top patents by PatentIndex Score
9 records- 0188US10792783B2System, control method and apparatus for chemical mechanical polishingTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Oct 6, 2020·6 cites·17 claims
- 0278US10872873B2Method for bonding wafers and bonding toolTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Dec 22, 2020·3 cites·20 claims
- 0369US6755726B2Polishing head with a floating knife-edgeUNITED MICROELECTRONICS CORP·Filed 2002·Granted Jun 29, 2004·14 cites·11 claims
- 0464US6569771B2Carrier head for chemical mechanical polishingUNITED MICROELECTRONICS CORP·Filed 2002·Granted May 27, 2003·10 cites·13 claims
- 0551US7070490B2Vacuum suction membrane for holding silicon waferUNITED MICROELECTRONICS CORP·Filed 2002·Granted Jul 4, 2006·5 cites·15 claims
- 0646US10050159B2Lens structureTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2016·Granted Aug 14, 2018·0 cites·20 claims
- 0744US2010043160A1Wafer cleaning rollerUNITED MICROELECTRONICS CORP·Filed 2008·Application pending·0 cites
- 0838US2009023362A1Retaining ring for chemical mechanical polishing, its operational method and application systemCHEN TZU-SHIN·Filed 2007·Application pending·0 cites
- 0935US2017358446A1Wafer processing apparatus and wafer processing method using the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2016·Application pending·0 cites
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