Inventor · disambiguated record
Shinji Kajita
Also filed as: KAJITA SHINJI
8 granted patents·5 pending applications·45 citations·filing 2000–2024
83Inventor score
Top patents by PatentIndex Score
13 records- 0188US10008380B2Substrate drying apparatus, substrate drying method and control programEBARA CORP·Filed 2014·Granted Jun 26, 2018·7 cites·26 claims
- 0284US8769842B2Substrate drying apparatus, substrate drying method and control programEBARA CORP·Filed 2013·Granted Jul 8, 2014·5 cites·16 claims
- 0381US8226771B2Substrate processing apparatus and substrate processing methodOIKAWA FUMITOSHI·Filed 2007·Granted Jul 24, 2012·12 cites·11 claims
- 0473US6972256B2Method and apparatus for forming thin film of metalEBARA CORP·Filed 2000·Granted Dec 6, 2005·17 cites·8 claims
- 0569US11094548B2Apparatus for cleaning substrate and substrate cleaning methodEBARA CORP·Filed 2017·Granted Aug 17, 2021·1 cites·21 claims
- 0666US2024286245A1Substrate treatment apparatus and method for treating substrateEBARA CORP·Filed 2024·Application pending·0 cites
- 0756US11028467B2Metal-based composite materialTYK CORP·Filed 2018·Granted Jun 8, 2021·0 cites·7 claims
- 0848US7578887B2Apparatus for and method of processing substrateEBARA CORP·Filed 2004·Granted Aug 25, 2009·3 cites·1 claims
- 0947US2011289795A1Substrate drying apparatus, substrate drying method and control programISHIBASHI TOMOATSU·Filed 2011·Application pending·0 cites
- 1044US11759852B2Installation structure for die casting sleeve, and die casting sleeveTYK CORP·Filed 2021·Granted Sep 19, 2023·0 cites·4 claims
- 1138US2008110861A1Substrate Processing Apparatus and MethodKAJITA SHINJI·Filed 2005·Application pending·0 cites
- 1235US2012160267A1Cleaning method and cleaning apparatusKODERA MASAKO·Filed 2011·Application pending·0 cites
- 1334US2003092264A1Substrate processing apparatus and methodFiled 2002·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →