Inventor · disambiguated record
Chen-Chia Chiang
Also filed as: CHIANG CHEN-CHIA
4 granted patents·7 citations·filing 1998–2017
65Inventor score
Top patents by PatentIndex Score
4 records- 0187US10190209B2PVD apparatus and method with deposition chamber having multiple targets and magnetsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2017·Granted Jan 29, 2019·4 cites·20 claims
- 0261US9708706B2PVD apparatus and method with deposition chamber having multiple targets and magnetsKAO CHUNG-EN·Filed 2011·Granted Jul 18, 2017·1 cites·20 claims
- 0340US9026241B2Closed loop control for reliabilityYANG WEN-CHENG·Filed 2012·Granted May 5, 2015·0 cites·16 claims
- 0427US6071831AMethod of reducing spiral defects by adding an isopropyl alcohol rinse step before depositing sogTAIWAN SEMICONDUCTOR MFG·Filed 1998·Granted Jun 6, 2000·2 cites·20 claims
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