Inventor · disambiguated record
Steve W. Bowes
Also filed as: BOWES STEVE W
15 granted patents·323 citations·filing 2000–2006
94Inventor score
Files withMICRON TECHNOLOGY INC15
Top patents by PatentIndex Score
15 records- 0196US6778275B2Aberration mark and method for estimating overlay error and optical aberrationsMICRON TECHNOLOGY INC·Filed 2002·Granted Aug 17, 2004·126 cites·65 claims
- 0292US7463367B2Estimating overlay error and optical aberrationsMICRON TECHNOLOGY INC·Filed 2006·Granted Dec 9, 2008·17 cites·21 claims
- 0387US6861367B2Semiconductor processing method using photoresist and an antireflective coatingMICRON TECHNOLOGY INC·Filed 2003·Granted Mar 1, 2005·32 cites·17 claims
- 0486US6465141B2Method for improved lithographic critical dimension controlMICRON TECHNOLOGY INC·Filed 2001·Granted Oct 15, 2002·21 cites·16 claims
- 0585US6730444B2Needle comb reticle pattern for critical dimension and registration measurements using a registration tool and methods for using sameMICRON TECHNOLOGY INC·Filed 2001·Granted May 4, 2004·43 cites·48 claims
- 0683US6545829B1Method and device for improved lithographic critical dimension controlMICRON TECHNOLOGY INC·Filed 2000·Granted Apr 8, 2003·18 cites·17 claims
- 0779US6486956B2Reducing asymmetrically deposited film induced registration errorMICRON TECHNOLOGY INC·Filed 2001·Granted Nov 26, 2002·13 cites·12 claims
- 0875US6538830B2Method and device for improved lithographic critical dimension controlMICRON TECHNOLOGY INC·Filed 2001·Granted Mar 25, 2003·12 cites·16 claims
- 0972US7127319B2Reducing asymmetrically deposited film induced registration errorMICRON TECHNOLOGY INC·Filed 2004·Granted Oct 24, 2006·8 cites·51 claims
- 1070US7180189B2Abberation mark and method for estimating overlay error and optical abberationsMICRON TECHNOLOGY INC·Filed 2004·Granted Feb 20, 2007·13 cites·24 claims
- 1170US7064080B2Semiconductor processing method using photoresist and an antireflective coatingMICRON TECHNOLOGY INC·Filed 2002·Granted Jun 20, 2006·11 cites·31 claims
- 1267US7200950B2Process for monitoring measuring device performanceMICRON TECHNOLOGY INC·Filed 2005·Granted Apr 10, 2007·1 cites·17 claims
- 1367US6990743B2Process for monitoring measuring device performanceMICRON TECHNOLOGY INC·Filed 2002·Granted Jan 31, 2006·6 cites·43 claims
- 1452US6852456B2Reducing asymmetrically deposited film induced registration errorMICRON TECHNOLOGY INC·Filed 2002·Granted Feb 8, 2005·2 cites·42 claims
- 1542US6795747B2Reducing asymmetrically deposited film induced registration errorMICRON TECHNOLOGY INC·Filed 2002·Granted Sep 21, 2004·0 cites·30 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →