Inventor · disambiguated record

Lach Otto

Also filed as: OTTO LACH

1 granted patent·2 citations·filing 2011–2011

19Inventor score

Technology areasH10P

Files withHOHENWARTER KARL-HEINZ1

Top patents by PatentIndex Score

1 record

0159US9355883B2Method and apparatus for liquid treatment of wafer shaped articlesHOHENWARTER KARL-HEINZ·Filed 2011·Granted May 31, 2016·2 cites·17 claims

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