Inventor · disambiguated record

Catharina Johanna Lucia Maria Van Den Enden

Also filed as: VAN DEN ENDEN CATHARINA JOHANN

1 granted patent·58 citations·filing 2001–2001

50Inventor score

Technology areasG03F

Files withASM LITHOGRAPHY BV1

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1 record

0190US6563564B2Method of operating an optical imaging system, lithographic projection apparatus, device manufacturing method, and device manufactured therebyASM LITHOGRAPHY BV·Filed 2001·Granted May 13, 2003·58 cites·22 claims

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