Inventor · disambiguated record
Bulent M. Basol
Also filed as: BASOL BULENT · BASOL BULENT M · BASOL BULENT MEHMET
171 granted patents·99 pending applications·6,109 citations·filing 1981–2023
99Inventor score
Top patents by PatentIndex Score
270 records- 0199US7172497B2Fabrication of semiconductor interconnect structuresASM NUTOOL INC·Filed 2002·Granted Feb 6, 2007·551 cites·16 claims
- 0299US7147766B2Chip interconnect and packaging deposition methods and structuresASM NUTOOL INC·Filed 2003·Granted Dec 12, 2006·554 cites·30 claims
- 0399US7129165B2Method and structure to improve reliability of copper interconnectsASM NUTOOL INC·Filed 2004·Granted Oct 31, 2006·559 cites·21 claims
- 0499US6497800B1Device providing electrical contact to the surface of a semiconductor workpiece during metal platingNUTOOL INC·Filed 2000·Granted Dec 24, 2002·144 cites·18 claims
- 0599US6413388B1Pad designs and structures for a versatile materials processing apparatusNUTOOL INC·Filed 2000·Granted Jul 2, 2002·191 cites·52 claims
- 0698US7829785B2Thin film solar cell with finger patternSOLOPOWER INC·Filed 2007·Granted Nov 9, 2010·69 cites·9 claims
- 0798US7825329B2Thin film solar cell manufacturing and integrationSOLOPOWER INC·Filed 2008·Granted Nov 2, 2010·69 cites·19 claims
- 0898US7491308B2Method of making rolling electrical contact to wafer front surfaceNOVELLUS SYSTEMS INC·Filed 2005·Granted Feb 17, 2009·18 cites·19 claims
- 0998US7374963B2Technique and apparatus for depositing thin layers of semiconductors for solar cell fabricationSOLOPOWER INC·Filed 2005·Granted May 20, 2008·55 cites·35 claims
- 1098US6413403B1Method and apparatus employing pad designs and structures with improved fluid distributionNUTOOL INC·Filed 2000·Granted Jul 2, 2002·93 cites·22 claims
- 1197US7736940B2Technique and apparatus for depositing layers of semiconductors for solar cell and module fabricationSOLOPOWER INC·Filed 2005·Granted Jun 15, 2010·49 cites·43 claims
- 1297US6867136B2Method for electrochemically processing a workpieceNUTOOL INC·Filed 2002·Granted Mar 15, 2005·141 cites·32 claims
- 1397US6610190B2Method and apparatus for electrodeposition of uniform film with minimal edge exclusion on substrateNUTOOL INC·Filed 2001·Granted Aug 26, 2003·65 cites·42 claims
- 1497US6534116B2Plating method and apparatus that creates a differential between additive disposed on a top surface and a cavity surface of a workpiece using an external influenceNUTOOL INC·Filed 2000·Granted Mar 18, 2003·136 cites·30 claims
- 1597US6471847B2Method for forming an electrical contact with a semiconductor substrateNUTOOL INC·Filed 2001·Granted Oct 29, 2002·113 cites·16 claims
- 1697US6355153B1Chip interconnect and packaging deposition methods and structuresNUTOOL INC·Filed 1999·Granted Mar 12, 2002·206 cites·11 claims
- 1796US8207440B2Photovoltaic modules with improved reliabilityBASOL BULENT M·Filed 2008·Granted Jun 26, 2012·31 cites·16 claims
- 1896US6942780B2Method and apparatus for processing a substrate with minimal edge exclusionASM NUTOOL INC·Filed 2003·Granted Sep 13, 2005·45 cites·32 claims
- 1996US6630059B1Workpeice proximity plating apparatusNUTOOL INC·Filed 2000·Granted Oct 7, 2003·92 cites·30 claims
- 2096US6482307B2Method of and apparatus for making electrical contact to wafer surface for full-face electroplating or electropolishingNUTOOL INC·Filed 2000·Granted Nov 19, 2002·126 cites·28 claims
- 2196US5028274AGroup I-III-VI2 semiconductor films for solar cell applicationINT SOLAR ELECTRIC TECHNOLOGY·Filed 1989·Granted Jul 2, 1991·163 cites·28 claims
- 2295US6251235B1Apparatus for forming an electrical contact with a semiconductor substrateNUTOOL INC·Filed 1999·Granted Jun 26, 2001·138 cites·21 claims
- 2395US5985691AMethod of making compound semiconductor films and making related electronic devicesINT SOLAR ELECTRIC TECHNOLOGY·Filed 1997·Granted Nov 16, 1999·280 cites·35 claims
- 2494US7795067B1Semitransparent flexible thin film solar cells and modulesSOLOPOWER INC·Filed 2009·Granted Sep 14, 2010·20 cites·18 claims
- 2594US7537955B2Low temperature nano particle preparation and deposition for phase-controlled compound film formationBASOL BULENT M·Filed 2005·Granted May 26, 2009·24 cites·12 claims
- 2694US7507321B2Efficient gallium thin film electroplating methods and chemistriesSOLOPOWER INC·Filed 2006·Granted Mar 24, 2009·23 cites·34 claims
- 2794US7091136B2Method of forming semiconductor compound film for fabrication of electronic device and film produced by sameBASOL BULENT M·Filed 2002·Granted Aug 15, 2006·64 cites·33 claims
- 2894US6780772B2Method and system to provide electroplanarization of a workpiece with a conducting material layerNUTOOL INC·Filed 2001·Granted Aug 24, 2004·73 cites·16 claims
- 2993US6852630B2Electroetching process and systemASM NUTOOL INC·Filed 2001·Granted Feb 8, 2005·73 cites·23 claims
- 3093US6666959B2Semiconductor workpiece proximity plating methods and apparatusNUTOOL INC·Filed 2001·Granted Dec 23, 2003·50 cites·11 claims
- 3193US6354916B1Modified plating solution for plating and planarization and process utilizing sameNU TOOL INC·Filed 2000·Granted Mar 12, 2002·87 cites·18 claims
- 3292US7541067B2Method and apparatus for continuous processing of buffer layers for group IBIIIAVIA solar cellsSOLOPOWER INC·Filed 2008·Granted Jun 2, 2009·17 cites·19 claims
- 3392US6908374B2Chemical mechanical polishing endpoint detectionNUTOOL INC·Filed 2002·Granted Jun 21, 2005·43 cites·29 claims
- 3492US6127202AOxide-based method of making compound semiconductor films and making related electronic devicesINT SOLAR ELECTRONIC TECHNOLOG·Filed 1998·Granted Oct 3, 2000·247 cites·39 claims
- 3592US4950615AMethod and making group IIB metal - telluride films and solar cellsINT SOLAR ELECTRIC TECHNOLOGY·Filed 1989·Granted Aug 21, 1990·124 cites·51 claims
- 3691US8580603B2Method of fabricating solar cells with electrodeposited compound interface layersBASOL BULENT M·Filed 2011·Granted Nov 12, 2013·11 cites·11 claims
- 3791US6958114B2Method and apparatus for forming an electrical contact with a semiconductor substrateASM NUTOOL INC·Filed 2002·Granted Oct 25, 2005·37 cites·28 claims
- 3891US6857947B2Advanced chemical mechanical polishing system with smart endpoint detectionASM NUTOOL INC·Filed 2003·Granted Feb 22, 2005·43 cites·49 claims
- 3990US7517444B2Plating method and apparatus for controlling deposition on predetermined portions of a workpieceNOVELLUS SYSTEMS INC·Filed 2005·Granted Apr 14, 2009·11 cites·11 claims
- 4090US6833063B2Electrochemical edge and bevel cleaning process and systemNUTOOL INC·Filed 2001·Granted Dec 21, 2004·50 cites·43 claims
- 4189US8017861B2Substrate preparation for thin film solar cell manufacturingSOLOPOWER INC·Filed 2008·Granted Sep 13, 2011·9 cites·15 claims
- 4289US7550070B2Electrode and pad assembly for processing conductive layersNOVELLUS SYSTEMS INC·Filed 2006·Granted Jun 23, 2009·8 cites·21 claims
- 4388US7833821B2Method and apparatus for thin film solar cell manufacturingSOLOPOWER INC·Filed 2006·Granted Nov 16, 2010·10 cites·15 claims
- 4488US7582506B2Precursor containing copper indium and gallium for selenide (sulfide) compound formationSOLOPOWER INC·Filed 2007·Granted Sep 1, 2009·11 cites·8 claims
- 4588US7329335B2Device providing electrical contact to the surface of a semiconductor workpiece during processingNOVELLUS SYSTEMS INC·Filed 2003·Granted Feb 12, 2008·11 cites·8 claims
- 4688US6921551B2Plating method and apparatus for controlling deposition on predetermined portions of a workpieceASM NUTOOL INC·Filed 2001·Granted Jul 26, 2005·31 cites·33 claims
- 4788US6722946B2Advanced chemical mechanical polishing system with smart endpoint detectionNUTOOL INC·Filed 2002·Granted Apr 20, 2004·26 cites·19 claims
- 4887US11699622B2Methods and apparatus for test pattern forming and film property measurementACTIVE LAYER PARAMETRICS INC·Filed 2022·Granted Jul 11, 2023·1 cites·8 claims
- 4987US7979969B2Method of detecting and passivating a defect in a solar cellSOLOPOWER INC·Filed 2010·Granted Jul 19, 2011·11 cites·13 claims
- 5086US8153889B2Roll-to-roll integration of thin film solar modulesBASOL BULENT M·Filed 2008·Granted Apr 10, 2012·9 cites·7 claims
Showing the top 50 of 270 patent records by PatentIndex Score.
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