Inventor · disambiguated record
Michael S. Delucia
Also filed as: DELUCIA MICHAEL S
4 granted patents·11 citations·filing 2017–2020
69Inventor score
Technology areasH01J
Files withVARIAN SEMICONDUCTOR EQUIPMENT ASS INC4
Top patents by PatentIndex Score
4 records- 0193US9978554B1Dual cathode ion sourceVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2017·Granted May 22, 2018·9 cites·19 claims
- 0283US10446372B2Dual cathode ion sourceVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2018·Granted Oct 15, 2019·2 cites·13 claims
- 0371US11114277B2Dual cathode ion sourceVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2020·Granted Sep 7, 2021·0 cites·18 claims
- 0466US10741361B2Dual cathode ion sourceVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2019·Granted Aug 11, 2020·0 cites·18 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →