Inventor · disambiguated record
Uwe Knappe
Also filed as: KNAPPE UWE
2 granted patents·1 pending application·27 citations·filing 2003–2006
59Inventor score
Top patents by PatentIndex Score
3 records- 0186US7403832B2Method and system for advanced process control including tool dependent machine constantsADVANCED MICRO DEVICES INC·Filed 2006·Granted Jul 22, 2008·24 cites·19 claims
- 0248US6946411B2Method and system for improving the efficiency of a mechanical alignment toolADVANCED MICRO DEVICES INC·Filed 2003·Granted Sep 20, 2005·3 cites·31 claims
- 0335US2006066824A1Method and system for contamination detection and monitoring a lithographic exposure tool and operating method for the same under controlled atmospheric conditionsKNAPPE UWE·Filed 2005·Application pending·0 cites
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