Inventor · disambiguated record
Takaharu Miyadate
Also filed as: MIYADATE TAKAHARU
4 granted patents·1 pending application·3 citations·filing 2018–2023
59Inventor score
Technology areasH10P
Files withTOKYO ELECTRON LTD5
Top patents by PatentIndex Score
5 records- 0191US12261028B2Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2023·Granted Mar 25, 2025·1 cites·12 claims
- 0271US11404249B2Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2018·Granted Aug 2, 2022·2 cites·25 claims
- 0354US2020098550A1Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2019·Application pending·0 cites
- 0442US11264267B2Apparatus for processing substrate and method for detecting a presence of a focus ring on a stageTOKYO ELECTRON LTD·Filed 2020·Granted Mar 1, 2022·0 cites·15 claims
- 0537US10763087B2Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2018·Granted Sep 1, 2020·0 cites·10 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →