Inventor · disambiguated record
Manny Sieradzki
Also filed as: SIERADZKI MANNY
11 granted patents·491 citations·filing 1993–2013
90Inventor score
Files withAXCELIS TECH INC5DIAMOND SEMICONDUCTOR GROUP3VARIAN SEMICONDUCTOR EQUIPMENT2SIERADZKI MANNY1
Top patents by PatentIndex Score
11 records- 0197US5350926ACompact high current broad beam ion implanterDIAMOND SEMICONDUCTOR GROUP·Filed 1993·Granted Sep 27, 1994·195 cites·23 claims
- 0295US5834786AHigh current ribbon beam ion implanterDIAMOND SEMICONDUCTOR GROUP·Filed 1996·Granted Nov 10, 1998·136 cites·14 claims
- 0386US5486080AHigh speed movement of workpieces in vacuum processingDIAMOND SEMICONDUCTOR GROUP·Filed 1994·Granted Jan 23, 1996·118 cites·20 claims
- 0485US7842931B2Extraction electrode manipulatorAXCELIS TECH INC·Filed 2008·Granted Nov 30, 2010·8 cites·20 claims
- 0581US7586111B2Ion implanter having combined hybrid and double mechanical scan architectureAXCELIS TECH INC·Filed 2007·Granted Sep 8, 2009·5 cites·20 claims
- 0679US7059817B2Wafer handling apparatus and methodAXCELIS TECH INC·Filed 2002·Granted Jun 13, 2006·23 cites·31 claims
- 0772US8809803B2Inductively coupled plasma ion source with multiple antennas for wide ion beamVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2013·Granted Aug 19, 2014·2 cites·20 claims
- 0870US7705328B2Broad ribbon beam ion implanter architecture with high mass-energy capabilityAXCELIS TECH INC·Filed 2007·Granted Apr 27, 2010·2 cites·25 claims
- 0966US8124947B2Ion implanter having combined hybrid and double mechanical scan architectureSIERADZKI MANNY·Filed 2009·Granted Feb 28, 2012·2 cites·13 claims
- 1055US7858955B2System and method of controlling broad beam uniformityAXCELIS TECH INC·Filed 2008·Granted Dec 28, 2010·0 cites·18 claims
- 1147US9269536B2Double ended electrode manipulatorVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2013·Granted Feb 23, 2016·0 cites·18 claims
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