Inventor · disambiguated record

Olgun Altug

Also filed as: ALTUG OLGUN

1 granted patent·23 citations·filing 2001–2001

42Inventor score

Technology areasH10P

Files withSTEAG RTP SYSTEMS GMBH1

Top patents by PatentIndex Score

1 record

0174US6953338B2Device for thermal treatment of substratesSTEAG RTP SYSTEMS GMBH·Filed 2001·Granted Oct 11, 2005·23 cites·23 claims

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