Inventor · disambiguated record
Christof Jalics
Also filed as: JALICS CHRISTOF
5 granted patents·1 pending application·5 citations·filing 2009–2024
67Inventor score
Top patents by PatentIndex Score
6 records- 0169US10649340B2Reflective optical element for EUV lithographyZEISS CARL SMT GMBH·Filed 2019·Granted May 12, 2020·1 cites·18 claims
- 0258US2024411234A1Method for machining a workpieceZEISS CARL SMT GMBH·Filed 2024·Application pending·0 cites
- 0356US12111578B2Mirror for an illumination optical unit of a projection exposure apparatus comprising a spectral filter in the form of a grating structure and method for producing a spectral filter in the form of a grating structure on a mirrorZEISS CARL SMT GMBH·Filed 2021·Granted Oct 8, 2024·0 cites·24 claims
- 0454US8597531B2Method for manufacturing a device on a substrateOBERNHUBER SANDRA·Filed 2009·Granted Dec 3, 2013·4 cites·35 claims
- 0553US11099484B2Method for repairing reflective optical elements for EUV lithographyZEISS CARL SMT GMBH·Filed 2019·Granted Aug 24, 2021·0 cites·20 claims
- 0644US8999187B2Method for manufacturing a device on a substrateINFINEON TECHNOLOGIES AG·Filed 2013·Granted Apr 7, 2015·0 cites·14 claims
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