Inventor · disambiguated record
Eric R. Dickey
Also filed as: DICKEY ERIC · DICKEY ERIC R
30 granted patents·12 pending applications·1,706 citations·filing 1989–2025
98Inventor score
Files withDICKEY ERIC R14VIRATEC THIN FILMS INC8LOTUS APPLIED TECH LLC5PLANAR SYSTEMS INC5LOTUS APPLIED TECHNOLOGY LLC3
Top patents by PatentIndex Score
42 records- 0198US8187679B2Radical-enhanced atomic layer deposition system and methodDICKEY ERIC R·Filed 2007·Granted May 29, 2012·540 cites·20 claims
- 0295US5618388AGeometries and configurations for magnetron sputtering apparatusOPTICAL COATING LABORATORY INC·Filed 1994·Granted Apr 8, 1997·165 cites·42 claims
- 0394US8137464B2Atomic layer deposition system for coating flexible substratesDICKEY ERIC R·Filed 2007·Granted Mar 20, 2012·13 cites·22 claims
- 0494US7923068B2Fabrication of composite materials using atomic layer depositionLOTUS APPLIED TECHNOLOGY LLC·Filed 2008·Granted Apr 12, 2011·59 cites·11 claims
- 0594US5372874ADC reactively sputtered optical coatings including niobium oxideVIRATEC THIN FILMS INC·Filed 1993·Granted Dec 13, 1994·92 cites·15 claims
- 0693US8202366B2Atomic layer deposition system utilizing multiple precursor zones for coating flexible substratesDICKEY ERIC R·Filed 2010·Granted Jun 19, 2012·6 cites·18 claims
- 0792US5879519AGeometries and configurations for magnetron sputtering apparatusOPTICAL COATING LABORATORY INC·Filed 1996·Granted Mar 9, 1999·105 cites·13 claims
- 0891US5470452AShielding for arc suppression in rotating magnetron sputtering systemsVIRATEC THIN FILMS INC·Filed 1993·Granted Nov 28, 1995·64 cites·20 claims
- 0991US5105310ADc reactively sputtered antireflection coatingsVIRATEC THIN FILMS INC·Filed 1990·Granted Apr 14, 1992·80 cites·10 claims
- 1090US5712528ADual substrate full color TFEL panel with insulator bridge structurePLANAR SYSTEMS INC·Filed 1995·Granted Jan 27, 1998·101 cites·12 claims
- 1189US9469901B2Atomic layer deposition method utilizing multiple precursor zones for coating flexible substratesDICKEY ERIC R·Filed 2012·Granted Oct 18, 2016·3 cites·18 claims
- 1289US5725746AShielding for arc suppression in rotating magnetron sputtering systemsVIRATEC THIN FILMS INC·Filed 1995·Granted Mar 10, 1998·76 cites·3 claims
- 1389US5270858AD.C. reactively sputtered antireflection coatingsVIRATEC THIN FILMS INC·Filed 1991·Granted Dec 14, 1993·69 cites·16 claims
- 1488US8637117B2Inhibiting excess precursor transport between separate precursor zones in an atomic layer deposition systemDICKEY ERIC R·Filed 2010·Granted Jan 28, 2014·4 cites·22 claims
- 1588US5504389ABlack electrode TFEL displayPLANAR SYSTEMS INC·Filed 1994·Granted Apr 2, 1996·83 cites·13 claims
- 1687US5106474AAnode structures for magnetron sputtering apparatusVIRATEC THIN FILMS INC·Filed 1990·Granted Apr 21, 1992·62 cites·34 claims
- 1786US9238868B2Atomic layer deposition method for coating flexible substratesDICKEY ERIC R·Filed 2012·Granted Jan 19, 2016·2 cites·43 claims
- 1885US5450238AFour-layer antireflection coating for deposition in in-like DC sputtering apparatusVIRATEC THIN FILMS INC·Filed 1993·Granted Sep 12, 1995·68 cites·9 claims
- 1977US5656888AOxygen-doped thiogallate phosphorFiled 1995·Granted Aug 12, 1997·42 cites·12 claims
- 2076US9435028B2Plasma generation for thin film deposition on flexible substratesDICKEY ERIC R·Filed 2013·Granted Sep 6, 2016·1 cites·18 claims
- 2174US9263359B2Mixed metal-silicon-oxide barriersDICKEY ERIC R·Filed 2014·Granted Feb 16, 2016·4 cites·20 claims
- 2266US6358632B1TFEL devices having insulating layersPLANAR SYSTEMS INC·Filed 1998·Granted Mar 19, 2002·27 cites·22 claims
- 2364US2025361606A1Metal-fluoride thin films and deposition methodsLOTUS APPLIED TECH LLC·Filed 2025·Application pending·0 cites
- 2463US5581150ATFEL device with injection layerPLANAR SYSTEMS INC·Filed 1995·Granted Dec 3, 1996·25 cites·21 claims
- 2559US2024368759A1Methods and systems for selective atomic layer depositionLOTUS APPLIED TECH LLC·Filed 2023·Application pending·0 cites
- 2659US2025197997A1Methods and systems for improved deposition productsLOTUS APPLIED TECH·Filed 2023·Application pending·0 cites
- 2758US9647208B2Low voltage embedded memory having conductive oxide and electrode stacksKARPOV ELIJAH V·Filed 2015·Granted May 9, 2017·1 cites·10 claims
- 2858US2010143710A1High rate deposition of thin films with improved barrier layer propertiesLOTUS APPLIED TECHNOLOGY LLC·Filed 2009·Application pending·0 cites
- 2956US9231204B2Low voltage embedded memory having conductive oxide and electrode stacksKARPOV ELIJAH V·Filed 2012·Granted Jan 5, 2016·1 cites·9 claims
- 3053US2024368760A1Methods and systems for inhibiting precursor interactions during radical-enhanced atomic layer depositionLOTUS APPLIED TECH LLC·Filed 2023·Application pending·0 cites
- 3153US2013177760A1Mixed metal oxide barrier films and atomic layer deposition method for making mixed metal oxide barrier filmsDICKEY ERIC R·Filed 2012·Application pending·0 cites
- 3251US9297076B2Substrate transport mechanism contacting a single side of a flexible web substrate for roll-to-roll thin film depositionDICKEY ERIC R·Filed 2011·Granted Mar 29, 2016·0 cites·37 claims
- 3350US2020017970A1Water-insensitive methods of forming metal oxide films and products related theretoLOTUS APPLIED TECH LLC·Filed 2019·Application pending·0 cites
- 3449US11935759B2High voltage, low pressure plasma enhanced atomic layer depositionLOTUS APPLIED TECH LLC·Filed 2020·Granted Mar 19, 2024·0 cites·21 claims
- 3549US9133546B1Electrically- and chemically-active adlayers for plasma electrodesDICKEY ERIC R·Filed 2014·Granted Sep 15, 2015·0 cites·29 claims
- 3649US8637123B2Oxygen radical generation for radical-enhanced thin film depositionDICKEY ERIC R·Filed 2010·Granted Jan 28, 2014·0 cites·25 claims
- 3748US5022726AMagnesium film reflectorsVIRATEC THIN FILMS INC·Filed 1989·Granted Jun 11, 1991·13 cites·10 claims
- 3840US2017025635A1Mixed metal-silicon-oxide barriersDICKEY ERIC R·Filed 2016·Application pending·0 cites
- 3940US2008045013A1Iridium encased metal interconnects for integrated circuit applicationsLAVOIE ADRIEN R·Filed 2006·Application pending·0 cites
- 4039US2005087132A1Methods and apparatus for the production of optical filtersPLANAR SYSTEMS INC·Filed 2003·Application pending·0 cites
- 4136US2016108524A1High-speed deposition of mixed oxide barrier filmsLOTUS APPLIED TECHNOLOGY LLC·Filed 2015·Application pending·0 cites
- 4229US2017088951A1Deposition of high-quality mixed oxide barrier filmsDICKEY ERIC R·Filed 2015·Application pending·0 cites
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