Inventor · disambiguated record
Gregory Nowling
Also filed as: NOWLING GREGORY · NOWLING GREGORY R
5 granted patents·5 pending applications·21 citations·filing 2005–2013
75Inventor score
Top patents by PatentIndex Score
10 records- 0183US9330937B2Etching of semiconductor structures that include titanium-based layersINTERMOLECULAR INC·Filed 2013·Granted May 3, 2016·7 cites·15 claims
- 0278US8716146B2Low temperature etching of silicon nitride structures using phosphoric acid solutionsNOWLING GREGORY·Filed 2012·Granted May 6, 2014·7 cites·20 claims
- 0371US8916479B1Selective etching of titanium nitrideINTERMOLECULAR INC·Filed 2013·Granted Dec 23, 2014·3 cites·20 claims
- 0466US9418865B2Wet etching of silicon containing antireflective coatingsINTERMOLECULAR INC·Filed 2013·Granted Aug 16, 2016·2 cites·17 claims
- 0564US8703620B2Methods for PFET fabrication using APM solutionsWASYLUK JOANNA·Filed 2012·Granted Apr 22, 2014·2 cites·10 claims
- 0640US2008014445A1Chamberless Plasma Deposition of CoatingsUNIV CALIFORNIA·Filed 2005·Application pending·0 cites
- 0737US2014179107A1Etching Silicon Nitride Using Dilute Hydrofluoric AcidINTERMOLECULAR INC·Filed 2012·Application pending·0 cites
- 0837US2014187052A1Selective Etching of Hafnium Oxide Using Diluted Hydrofluoric AcidINTERMOLECULAR INC·Filed 2012·Application pending·0 cites
- 0937US2014273467A1Polycrystalline-silicon etch with low-peroxide apmINTERMOLECULAR INC·Filed 2013·Application pending·0 cites
- 1036US2014187051A1Poly Removal for replacement gate with an APM mixtureINTERMOLECULAR INC·Filed 2012·Application pending·0 cites
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