Inventor · disambiguated record
Kozo Kai
Also filed as: KAI KOZO
3 granted patents·15 citations·filing 1990–2013
65Inventor score
Technology areasH10P
Top patents by PatentIndex Score
3 records- 0171US9318363B2Substrate processing system and substrate position correction methodTOKYO ELECTRON LTD·Filed 2013·Granted Apr 19, 2016·4 cites·6 claims
- 0270US9070728B2Method of lowering temperature of substrate table, computer-readable storage medium, and substrate processing systemKOBAYASHI KENICHI·Filed 2010·Granted Jun 30, 2015·4 cites·15 claims
- 0332US5088697AHeat treating apparatusTOKYO ELECTRON LTD·Filed 1990·Granted Feb 18, 1992·7 cites·13 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →