Inventor · disambiguated record
Fumitoshi Kumagai
Also filed as: KUMAGAI Fumitoshi
3 granted patents·1 pending application·115 citations·filing 2013–2022
76Inventor score
Files withTOKYO ELECTRON LTD4
Top patents by PatentIndex Score
4 records- 0196US10755894B2Power supply systemTOKYO ELECTRON LTD·Filed 2018·Granted Aug 25, 2020·40 cites·7 claims
- 0295US10115567B2Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2015·Granted Oct 30, 2018·41 cites·11 claims
- 0394US9922802B2Power supply system, plasma etching apparatus, and plasma etching methodTOKYO ELECTRON LTD·Filed 2013·Granted Mar 20, 2018·34 cites·11 claims
- 0449US2023077143A1Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2022·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →