Inventor · disambiguated record
Jun Nakagomi
Also filed as: NAKAGOMI Jun
5 granted patents·3 pending applications·3 citations·filing 2014–2025
63Inventor score
Top patents by PatentIndex Score
8 records- 0186US11244810B2Electric field sensor, surface wave plasma source, and surface wave plasma processing apparatusTOKYO ELECTRON LTD·Filed 2020·Granted Feb 8, 2022·2 cites·16 claims
- 0260US10557200B2Plasma processing device with shower plate having protrusion for suppressing film formation in gas holes of shower plateTOKYO ELECTRON LTD·Filed 2014·Granted Feb 11, 2020·1 cites·6 claims
- 0360US2025231167A1Method for quantifying reactive nox, and formulation for suppressing generation of nitroso compoundsSAWAI SEIYAKU KK·Filed 2025·Application pending·0 cites
- 0452US2022384146A1Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2022·Application pending·0 cites
- 0551US2019075644A1Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2018·Application pending·0 cites
- 0646US9991097B2Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2017·Granted Jun 5, 2018·0 cites·6 claims
- 0738US11508556B2Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2018·Granted Nov 22, 2022·0 cites·11 claims
- 0836US10804078B2Plasma processing apparatus and gas introduction mechanismTOKYO ELECTRON LTD·Filed 2017·Granted Oct 13, 2020·0 cites·13 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →