Inventor · disambiguated record
Tsukasa Yonekawa
Also filed as: YONEKAWA TSUKASA
5 granted patents·2 pending applications·20 citations·filing 2002–2018
74Inventor score
Top patents by PatentIndex Score
7 records- 0161US7304002B2Method of oxidizing member to be treatedTOKYO ELECTRON LTD·Filed 2003·Granted Dec 4, 2007·8 cites·4 claims
- 0254US7625604B2Heat treatment method and heat treatment apparatusTOKYO ELECTRON LTD·Filed 2003·Granted Dec 1, 2009·5 cites·11 claims
- 0352US6972235B2Method for processing semiconductor substrateTOKYO ELECTRON LTD·Filed 2003·Granted Dec 6, 2005·4 cites·9 claims
- 0450US6933249B2Method of fabricating semiconductor deviceTOKYO ELECTRON LTD·Filed 2002·Granted Aug 23, 2005·3 cites·9 claims
- 0542US2019041246A1Sensor module and sheet moduleDAINIPPON PRINTING CO LTD·Filed 2018·Application pending·0 cites
- 0641US8471573B2Dynamic quantity sensor and manufacturing method thereofASANO MASAAKI·Filed 2012·Granted Jun 25, 2013·0 cites·9 claims
- 0736US2014130367A1Supercritical drying device and supercritical drying methodYONEKAWA TSUKASA·Filed 2013·Application pending·0 cites
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