Inventor · disambiguated record
Felipe Soberon
Also filed as: SOBERON FELIPE
6 granted patents·3 pending applications·35 citations·filing 2008–2020
80Inventor score
Top patents by PatentIndex Score
9 records- 0189US9370599B2Coil assembly for plasma generationNOVAERUS PATENTS LTD·Filed 2015·Granted Jun 21, 2016·7 cites·16 claims
- 0287US9327048B2Air treatment device having a plasma coil electrostatic precipitator assemblyNOVAERUS PATENTS LTD·Filed 2015·Granted May 3, 2016·7 cites·28 claims
- 0385US9842726B2Method and apparatus for the detection of arc events during the plasma processing of a wafer, surface of substrateDANIELS STEPHEN·Filed 2010·Granted Dec 12, 2017·13 cites·27 claims
- 0481US10786593B2Flexible electrode assembly for plasma generation and air treatment system including the flexible electrode assemblyNOVAERUS PATENTS LTD·Filed 2015·Granted Sep 29, 2020·4 cites·6 claims
- 0569US8945467B2Method and apparatus for the sterilisation of articlesSOBERON FELIPE·Filed 2011·Granted Feb 3, 2015·4 cites·19 claims
- 0651US11821655B2Air treatment system, method and apparatusNOVAERUS PATENTS LTD·Filed 2020·Granted Nov 21, 2023·0 cites·5 claims
- 0747US2015343109A1Coil Assembly for Plasma GenerationNOVAERUS PATENT LTD·Filed 2015·Application pending·0 cites
- 0847US2015343456A1Air Treatment Device Having A Plasma Coil Electrostatic Precipitator AssemblyNOVAERUS PATENTS LTD·Filed 2015·Application pending·0 cites
- 0944US2010216263A1Method and Apparatus for Measuring Process Parameters of a Plasma Etch ProcessLEXAS RES LTD·Filed 2008·Application pending·0 cites
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