Inventor · disambiguated record
Sarathi Roy
Also filed as: ROY SARATHI
15 granted patents·4 pending applications·10 citations·filing 2017–2024
87Inventor score
Files withASML NETHERLANDS BV19
Top patents by PatentIndex Score
19 records- 0192US12044979B2Computational metrology based sampling schemeASML NETHERLANDS BV·Filed 2023·Granted Jul 23, 2024·2 cites·20 claims
- 0290US11994845B2Determining a correction to a processASML NETHERLANDS BV·Filed 2021·Granted May 28, 2024·2 cites·20 claims
- 0386US11635698B2Computational metrology based sampling schemeASML NETHERLANDS BV·Filed 2018·Granted Apr 25, 2023·2 cites·20 claims
- 0484US11092902B2Method and apparatus for detecting substrate surface variationsASML NETHERLANDS BV·Filed 2018·Granted Aug 17, 2021·2 cites·14 claims
- 0581US11448973B2Computational metrology based correction and controlASML NETHERLANDS BV·Filed 2018·Granted Sep 20, 2022·2 cites·21 claims
- 0680US12493285B2Determining a correction to a processASML NETHERLANDS BV·Filed 2024·Granted Dec 9, 2025·0 cites·20 claims
- 0776US2024377756A1Computational metrology based sampling schemeASML NETHERLANDS BV·Filed 2024·Application pending·0 cites
- 0869US11520238B2Optimizing an apparatus for multi-stage processing of product unitsASML NETHERLANDS BV·Filed 2021·Granted Dec 6, 2022·0 cites·20 claims
- 0969US11086305B2Determining a correction to a processASML NETHERLANDS BV·Filed 2021·Granted Aug 10, 2021·0 cites·28 claims
- 1069US2022365446A1Computational metrology based correction and controlASML NETHERLANDS BV·Filed 2022·Application pending·0 cites
- 1164US12429781B2Metrology method and associated metrology and lithographic apparatusesASML NETHERLANDS BV·Filed 2021·Granted Sep 30, 2025·0 cites·20 claims
- 1261US12493248B2Method for optimizing a sampling scheme and associated apparatusesASML NETHERLANDS BV·Filed 2021·Granted Dec 9, 2025·0 cites·20 claims
- 1360US12366809B2Methods and apparatus for controlling a lithographic processASML NETHERLANDS BV·Filed 2019·Granted Jul 22, 2025·0 cites·20 claims
- 1457US12306545B2Determining lithographic matching performanceASML NETHERLANDS BV·Filed 2020·Granted May 20, 2025·0 cites·20 claims
- 1556US11150562B2Optimizing an apparatus for multi-stage processing of product unitsASML NETHERLANDS BV·Filed 2018·Granted Oct 19, 2021·0 cites·20 claims
- 1655US2024184254A1Causal convolution network for process controlASML NETHERLANDS BV·Filed 2022·Application pending·0 cites
- 1752US2024310738A1Method of determining a correction for at least one control parameter in a semiconductor manufacturing processASML NETHERLANDS BV·Filed 2022·Application pending·0 cites
- 1850US11281110B2Methods using fingerprint and evolution analysisASML NETHERLANDS BV·Filed 2019·Granted Mar 22, 2022·0 cites·22 claims
- 1941US11243470B2Method and apparatus for deriving corrections, method and apparatus for determining a property of a structure, device manufacturing methodASML NETHERLANDS BV·Filed 2017·Granted Feb 8, 2022·0 cites·26 claims
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