Inventor · disambiguated record
Olga Vladimirsky
Also filed as: VLADIMIRSKY OLGA
2 granted patents·68 citations·filing 1994–2010
65Inventor score
Technology areasG03F
Top patents by PatentIndex Score
2 records- 0189US8629973B2Lithographic apparatus and method for illumination uniformity correction and uniformity drift compensationZIMMERMAN RICHARD CARL·Filed 2010·Granted Jan 14, 2014·13 cites·20 claims
- 0281US6093520AHigh aspect ratio microstructures and methods for manufacturing microstructuresUNIV LOUISIANA STATE·Filed 1994·Granted Jul 25, 2000·55 cites·21 claims
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