Inventor
SWEENEY CIAN
US9 patents
Patents
9 patentsUS9735035B1Aug 15, 2017
Methods and apparatuses for estimating on-wafer oxide layer reduction effectiveness via color sensing
LAM RES CORP7 citations83
US9481942B2Nov 1, 2016
Geometry and process optimization for ultra-high RPM plating
LAM RES CORP9 citations83
US10927475B2Feb 23, 2021
Controlling plating electrolyte concentration on an electrochemical plating apparatus
LAM RES CORP4 citations82
US11859300B2Jan 2, 2024
Controlling plating electrolyte concentration on an electrochemical plating apparatus
LAM RES CORP2 citations71
US11401623B2Aug 2, 2022
Controlling plating electrolyte concentration on an electrochemical plating apparatus
LAM RES CORP3 citations71
US10593586B2Mar 17, 2020
Systems and methods for controlling substrate approach toward a target horizontal plane
LAM RES CORP2 citations71
US12392049B2Aug 19, 2025
Controlling plating electrolyte concentration on an electrochemical plating apparatus
LAM RES CORP0 citations61
US10497592B2Dec 3, 2019
Methods and apparatuses for estimating on-wafer oxide layer reduction effectiveness via color sensing
LAM RES CORP1 citations61
US11621187B2Apr 4, 2023
Systems and methods for controlling substrate approach toward a target horizontal plane
LAM RES CORP0 citations60