Inventor · disambiguated record
Chang-Gong Wang
Also filed as: WANG CHANG-GONG
8 granted patents·1,531 citations·filing 2006–2015
90Inventor score
Top patents by PatentIndex Score
8 records- 0198US8883270B2Systems and methods for thin-film deposition of metal oxides using excited nitrogen—oxygen speciesSHERO ERIC·Filed 2010·Granted Nov 11, 2014·544 cites·22 claims
- 0298US7795160B2ALD of metal silicate filmsASM INC·Filed 2006·Granted Sep 14, 2010·412 cites·31 claims
- 0397US8877655B2Systems and methods for thin-film deposition of metal oxides using excited nitrogen-oxygen speciesSHERO ERIC J·Filed 2011·Granted Nov 4, 2014·551 cites·25 claims
- 0488US7972977B2ALD of metal silicate filmsASM INC·Filed 2007·Granted Jul 5, 2011·7 cites·15 claims
- 0585US9238865B2Multiple vapor sources for vapor depositionPOMAREDE CHRISTOPHE·Filed 2012·Granted Jan 19, 2016·9 cites·9 claims
- 0684US9873942B2Methods of vapor deposition with multiple vapor sourcesASM IP HOLDING BV·Filed 2015·Granted Jan 23, 2018·3 cites·19 claims
- 0772US9139906B2Doping with ALD technologyWANG CHANG-GONG·Filed 2008·Granted Sep 22, 2015·5 cites·30 claims
- 0860US8563444B2ALD of metal silicate filmsWANG CHANG-GONG·Filed 2011·Granted Oct 22, 2013·0 cites·15 claims
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