Inventor · disambiguated record
Hirofumi Fukumoto
Also filed as: FUKUMOTO HIROFUMI
6 granted patents·3 pending applications·28 citations·filing 1995–2009
77Inventor score
Files withPANASONIC CORP3FUKUMOTO HIROFUMI2ASAHI CHEMICAL IND1MATSUSHITA ELECTRIC INDUSTRIAL CO LTD1YAMAZAKI WATARU1
Top patents by PatentIndex Score
9 records- 0174US7425455B2Biosensor, magnetic molecule measurement deviceASAHI CHEMICAL IND·Filed 2003·Granted Sep 16, 2008·13 cites·19 claims
- 0261US7838185B2Focus measurement method and method of manufacturing a semiconductor devicePANASONIC CORP·Filed 2009·Granted Nov 23, 2010·2 cites·17 claims
- 0357US7474382B2Method for determining focus deviation amount in pattern exposure and pattern exposure methodPANASONIC CORP·Filed 2004·Granted Jan 6, 2009·5 cites·22 claims
- 0448US8227255B2Biosensor and method of assaying objectFUKUMOTO HIROFUMI·Filed 2009·Granted Jul 24, 2012·0 cites·7 claims
- 0547US2011165551A1Device and system for assisting in using equipmentYAMAZAKI WATARU·Filed 2009·Application pending·0 cites
- 0637US7883840B2Developing method and method for fabricating semiconductor device using the developing methodPANASONIC CORP·Filed 2006·Granted Feb 8, 2011·0 cites·12 claims
- 0737US6420076B1Method and apparatus of inspecting foreign substance on substrate surfaceMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 1995·Granted Jul 16, 2002·8 cites·16 claims
- 0829US2005151448A1Inclination sensor, method of manufacturing inclination sensor, and method of measuring inclinationFiled 2003·Application pending·0 cites
- 0921US2006292630A1Biosensor and method of analyte measuringFUKUMOTO HIROFUMI·Filed 2004·Application pending·0 cites
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