Inventor · disambiguated record
Taiji Kiku
Also filed as: KIKU TAIJI
7 granted patents·23 citations·filing 2002–2008
79Inventor score
Files withNGK INSULATORS LTD7
Top patents by PatentIndex Score
7 records- 0171US6855576B2Method for cleaning a ceramic member for use in a system for producing semiconductors, a cleaning agent and a combination of cleaning agentsNGK INSULATORS LTD·Filed 2002·Granted Feb 15, 2005·12 cites·8 claims
- 0270US7288020B1Method of blasting processNGK INSULATORS LTD·Filed 2007·Granted Oct 30, 2007·5 cites·4 claims
- 0369US7401399B2Method of manufacturing a substrate heating deviceNGK INSULATORS LTD·Filed 2005·Granted Jul 22, 2008·3 cites·21 claims
- 0467US7211156B2Method for cleaning a ceramic member for use in a system for producing semiconductors, a cleaning agent and a combination of cleaning agentsNGK INSULATORS LTD·Filed 2005·Granted May 1, 2007·2 cites·5 claims
- 0560US7261780B2Ceramic susceptor and a method of cleaning the sameNGK INSULATORS LTD·Filed 2005·Granted Aug 28, 2007·1 cites·4 claims
- 0655US7686889B2Susceptor for semiconductor manufacturing apparatusNGK INSULATORS LTD·Filed 2008·Granted Mar 30, 2010·0 cites·4 claims
- 0740US7948516B2Position accuracy evaluation method and position accuracy evaluation apparatusNGK INSULATORS LTD·Filed 2006·Granted May 24, 2011·0 cites·4 claims
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