Inventor · disambiguated record
R. Marshall Stowell
Also filed as: STOWELL R M · STOWELL R MARSHALL
16 granted patents·2 pending applications·589 citations·filing 1997–2016
95Inventor score
Top patents by PatentIndex Score
18 records- 0198US6964792B1Methods and apparatus for controlling electrolyte flow for uniform platingNOVELLUS SYSTEMS INC·Filed 2001·Granted Nov 15, 2005·121 cites·58 claims
- 0297US8043958B1Capping before barrier-removal IC fabrication methodNOVELLUS SYSTEMS INC·Filed 2010·Granted Oct 25, 2011·26 cites·13 claims
- 0396US8158532B2Topography reduction and control by selective accelerator removalMAYER STEVEN T·Filed 2006·Granted Apr 17, 2012·44 cites·70 claims
- 0496US7605082B1Capping before barrier-removal IC fabrication methodNOVELLUS SYSTEMS INC·Filed 2005·Granted Oct 20, 2009·36 cites·14 claims
- 0596US6800187B1Clamshell apparatus for electrochemically treating wafersNOVELLUS SYSTEMS INC·Filed 2001·Granted Oct 5, 2004·168 cites·45 claims
- 0695US9677188B2Electrofill vacuum plating cellNOVELLUS SYSTEMS INC·Filed 2013·Granted Jun 13, 2017·8 cites·27 claims
- 0793US8470191B2Topography reduction and control by selective accelerator removalMAYER STEVEN T·Filed 2007·Granted Jun 25, 2013·19 cites·10 claims
- 0893US8415261B1Capping before barrier-removal IC fabrication methodREID JONATHAN D·Filed 2011·Granted Apr 9, 2013·12 cites·6 claims
- 0993US7811925B1Capping before barrier-removal IC fabrication methodNOVELLUS SYSTEMS INC·Filed 2008·Granted Oct 12, 2010·16 cites·20 claims
- 1090US7690324B1Small-volume electroless plating cellNOVELLUS SYSTEMS INC·Filed 2005·Granted Apr 6, 2010·21 cites·32 claims
- 1187US6815349B1Electroless copper deposition apparatusNOVELLUS SYSTEMS INC·Filed 2002·Granted Nov 9, 2004·34 cites·31 claims
- 1284US9028657B2Front referenced anodeFENG JINGBIN·Filed 2010·Granted May 12, 2015·5 cites·13 claims
- 1380US9340893B2Front referenced anodeNOVELLUS SYSTEMS INC·Filed 2015·Granted May 17, 2016·2 cites·14 claims
- 1480US6126382AApparatus for aligning substrate to chuck in processing chamberNOVELLUS SYSTEMS INC·Filed 1997·Granted Oct 3, 2000·71 cites·27 claims
- 1571US10351968B2Front referenced anodeNOVELLUS SYSTEMS INC·Filed 2016·Granted Jul 16, 2019·1 cites·24 claims
- 1666US8257781B1Electroless plating-liquid systemWEBB ERIC G·Filed 2005·Granted Sep 4, 2012·5 cites·77 claims
- 1738US2004065540A1Liquid treatment using thin liquid layerNOVELLUS SYSTEMS INC·Filed 2003·Application pending·0 cites
- 1830US2005178402A1Methods and apparatus for cleaning and drying a work pieceFiled 2004·Application pending·0 cites
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