Inventor · disambiguated record
Yamin Ma
Also filed as: MA YAMIN
14 granted patents·9 pending applications·123 citations·filing 1993–2017
91Inventor score
Top patents by PatentIndex Score
23 records- 0191US8511583B2Fine droplet atomizer for liquid precursor vaporizationLIU BENJAMIN Y H·Filed 2011·Granted Aug 20, 2013·5 cites·4 claims
- 0289US8297223B2Method and apparatus for particle filtration and enhancing tool performance in film depositionLIU BENJAMIN·Filed 2008·Granted Oct 30, 2012·15 cites·4 claims
- 0384US8783652B2Liquid flow control for film depositionDINH THUC M·Filed 2013·Granted Jul 22, 2014·9 cites·13 claims
- 0480US8554064B1Method and apparatus for generating vapor at high ratesDINH THUC·Filed 2011·Granted Oct 8, 2013·17 cites·12 claims
- 0570US5647543AElectrostatic ionizing systemGRACO INC·Filed 1995·Granted Jul 15, 1997·38 cites·20 claims
- 0666US8945281B1Method and apparatus for vapor generation and wafer cleaningMSP CORP·Filed 2014·Granted Feb 3, 2015·1 cites·22 claims
- 0757US5364035AHigh voltage sealing and isolation via dynamic sealsGRACO INC·Filed 1993·Granted Nov 15, 1994·25 cites·13 claims
- 0857US2006144338A1High accuracy vapor generation and delivery for thin film depositionMSP CORPORATON·Filed 2005·Application pending·0 cites
- 0957US2010203244A1High accuracy vapor generation and delivery for thin film depositionMSP CORP·Filed 2010·Application pending·0 cites
- 1055US8986784B2Fine droplet atomization for liquid precursor vaporizationMSP CORP·Filed 2013·Granted Mar 24, 2015·0 cites·5 claims
- 1155US2009293807A1Apparatus for filtration and gas-vapor mixing in thin film depositionMSP CORP·Filed 2009·Application pending·0 cites
- 1252US10287679B2Apparatus and method for vapor generation and film depositionMSP CORP·Filed 2017·Granted May 14, 2019·0 cites·15 claims
- 1352US2014096715A1Apparatus for filtration and gas-vapor mixing in thin film depositionMSP CORP·Filed 2013·Application pending·0 cites
- 1451US8728240B2Apparatus for vapor condensation and recoveryLIU BENJAMIN Y H·Filed 2012·Granted May 20, 2014·0 cites·4 claims
- 1551US2013295776A1Method for vapor condensation and recoveryMSP CORP·Filed 2013·Application pending·0 cites
- 1650US9089800B2Method and apparatus for vapor and gas filtrationLIU BENJAMIN Y H·Filed 2012·Granted Jul 28, 2015·0 cites·20 claims
- 1750US2013312674A1Integrated system for vapor generation and thin film depositionMSP CORP·Filed 2013·Application pending·0 cites
- 1846US2011232588A1Integrated system for vapor generation and thin film depositionMSP CORP·Filed 2011·Application pending·0 cites
- 1945US9797593B2Apparatus and method for vapor generation and film depositionMSP CORP·Filed 2015·Granted Oct 24, 2017·0 cites·15 claims
- 2044US2005147749A1High-performance vaporizer for liquid-precursor and multi-liquid-precursor vaporization in semiconductor thin film depositionMSP CORP·Filed 2004·Application pending·0 cites
- 2137US2006174810A1Simple but effective sail handling system that allows sail control to be carried out single-handed from the safety of the cockpitMA YAMIN·Filed 2006·Application pending·0 cites
- 2235US5346134ACO2 -assisted spray gun and nozzleGRACO INC·Filed 1993·Granted Sep 13, 1994·10 cites·11 claims
- 2331US6293157B1Compensation of coriolis meter motion induced signalGRACO MINNESOTA INC·Filed 1998·Granted Sep 25, 2001·3 cites·3 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →