Inventor · disambiguated record
Yuriy Elner
Also filed as: ELNER YURIY
6 granted patents·25 citations·filing 2015–2021
80Inventor score
Files withMKS INSTR INC6
Top patents by PatentIndex Score
6 records- 0194US11531312B2Adaptive control for a power generatorMKS INSTR INC·Filed 2021·Granted Dec 20, 2022·5 cites·16 claims
- 0290US10395895B2Feedback control by RF waveform tailoring for ion energy distributionMKS INSTR INC·Filed 2015·Granted Aug 27, 2019·6 cites·28 claims
- 0390US9876476B2Supervisory control of radio frequency (RF) impedance tuning operationMKS INSTR INC·Filed 2015·Granted Jan 23, 2018·7 cites·16 claims
- 0484US11042140B2Adaptive control for a power generatorMKS INSTR INC·Filed 2019·Granted Jun 22, 2021·3 cites·27 claims
- 0582US10692698B2Feedback control by RF waveform tailoring for ion energy distributionMKS INSTR INC·Filed 2019·Granted Jun 23, 2020·2 cites·18 claims
- 0673US10666206B2Supervisory control of radio frequency (RF) impedance tuning operationMKS INSTR INC·Filed 2017·Granted May 26, 2020·2 cites·35 claims
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