Inventor · disambiguated record
Frederick M. Carlson
Also filed as: CARLSON FREDERICK · CARLSON FREDERICK M
16 granted patents·1 pending application·43 citations·filing 2003–2019
90Inventor score
Files withVARIAN SEMICONDUCTOR EQUIPMENT ASS INC6KELLERMAN PETER L4AXCELIS TECH INC2VARIAN SEMICONDUCTOR EQUIPMENT2CARLSON FREDERICK M1
Top patents by PatentIndex Score
17 records- 0187US7816153B2Method and apparatus for producing a dislocation-free crystalline sheetVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2009·Granted Oct 19, 2010·8 cites·9 claims
- 0284US9957636B2System and method for crystalline sheet growth using a cold block and gas jetVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2014·Granted May 1, 2018·2 cites·20 claims
- 0383US10030317B2Apparatus and method for controlling thickness of a crystalline sheet grown on a meltVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2014·Granted Jul 24, 2018·2 cites·17 claims
- 0481US10801125B2Method for controlling heat flow within a silicon melt using a heat diffusion barrier assemblyLEADING EDGE CRYSTAL TECH INC·Filed 2019·Granted Oct 13, 2020·1 cites·20 claims
- 0580US10415151B1Apparatus for controlling heat flow within a silicon meltVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2014·Granted Sep 17, 2019·1 cites·8 claims
- 0677US9587324B2Apparatus for processing a meltVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2014·Granted Mar 7, 2017·1 cites·19 claims
- 0774US7033443B2Gas-cooled clamp for RTPAXCELIS TECH INC·Filed 2003·Granted Apr 25, 2006·17 cites·22 claims
- 0872US8226903B2Removal of a sheet from a production apparatusKELLERMAN PETER L·Filed 2011·Granted Jul 24, 2012·2 cites·11 claims
- 0971US9567691B2Melt purification and delivery systemKELLERMAN PETER L·Filed 2009·Granted Feb 14, 2017·1 cites·13 claims
- 1063US10106911B2Method for growing a silicon crystal substrate from a melt by directing a flow of molten silicon around a baffle structureVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2016·Granted Oct 23, 2018·0 cites·9 claims
- 1163US6735378B1Pressure controlled heat source and method for using such for RTPAXCELIS TECH INC·Filed 2003·Granted May 11, 2004·8 cites·50 claims
- 1259US7998224B2Removal of a sheet from a production apparatusVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2009·Granted Aug 16, 2011·0 cites·16 claims
- 1359US2011003024A1Method and apparatus for producing a dislocation-free crystalline sheetVERIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES INC·Filed 2010·Application pending·0 cites
- 1455US10179958B2Apparatus and method for crystalline sheet growthVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2017·Granted Jan 15, 2019·0 cites·19 claims
- 1555US9464364B2Thermal load leveling during silicon crystal growth from a melt using anisotropic materialsCARLSON FREDERICK M·Filed 2011·Granted Oct 11, 2016·0 cites·9 claims
- 1655US8545624B2Method for continuous formation of a purified sheet from a meltKELLERMAN PETER L·Filed 2009·Granted Oct 1, 2013·0 cites·9 claims
- 1739US9267219B2Gas-lift pumps for flowing and purifying molten siliconKELLERMAN PETER L·Filed 2011·Granted Feb 23, 2016·0 cites·17 claims
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