Inventor · disambiguated record
Teppei Uchimura
Also filed as: UCHIMURA TEPPEI
2 granted patents·3 citations·filing 2011–2013
37Inventor score
Technology areasH10P
Top patents by PatentIndex Score
2 records- 0162US8728338B2Ultra high-speed wet etching apparatusNAT UNIVERSITY CORP OF TOHOKU UNIVERSITY·Filed 2013·Granted May 20, 2014·3 cites·7 claims
- 0238US9240505B2Method of etching backside Si substrate of SOI substrate to expose SiO2 layer using fluonitric acidOHMI TADAHIRO·Filed 2011·Granted Jan 19, 2016·0 cites·5 claims
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