Inventor · disambiguated record
Elvis M. Chan
Also filed as: CHAN ELVIS M
2 granted patents·3 citations·filing 2004–2005
43Inventor score
Top patents by PatentIndex Score
2 records- 0159US7344989B2CMP wafer contamination reduced by insitu cleanNEC ELECTRONICS AMERICA INC·Filed 2005·Granted Mar 18, 2008·2 cites·13 claims
- 0235US7795150B2Metal capping of damascene structures to improve reliability using hyper selective chemical-mechanical depositionRENESAS ELECTRONICS AMERICA IN·Filed 2004·Granted Sep 14, 2010·1 cites·9 claims
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