Inventor · disambiguated record
Kevin M. Welsh
Also filed as: WELSH KEVIN · WELSH KEVIN M · WELSH KEVIN MICHAEL
13 granted patents·575 citations·filing 1990–1998
95Inventor score
Top patents by PatentIndex Score
13 records- 0195US5607824AAntireflective coating for microlithographyIBM·Filed 1994·Granted Mar 4, 1997·61 cites·2 claims
- 0292US5482817AMid and deep-uv antireflection coatings and methods for use thereofIBM·Filed 1994·Granted Jan 9, 1996·70 cites·9 claims
- 0391US6207787B1Antireflective coating for microlithographyIBM·Filed 1998·Granted Mar 27, 2001·51 cites·7 claims
- 0490US5401614AMid and deep-UV antireflection coatings and methods for use thereofIBM·Filed 1993·Granted Mar 28, 1995·68 cites·5 claims
- 0590US5380621AMid and deep-UV antireflection coatings and methods for use thereofIBM·Filed 1993·Granted Jan 10, 1995·57 cites·7 claims
- 0688US5554485AMid and deep-UV antireflection coatings and methods for use thereofIBM·Filed 1994·Granted Sep 10, 1996·56 cites·20 claims
- 0787US5372912ARadiation-sensitive resist composition and process for its useIBM·Filed 1992·Granted Dec 13, 1994·55 cites·5 claims
- 0885US6018862AThin-film magnetic recording head using a plated metal gap layerSEAGATE TECHNOLOGY·Filed 1998·Granted Feb 1, 2000·63 cites·14 claims
- 0983US5164278ASpeed enhancers for acid sensitized resistsIBM·Filed 1990·Granted Nov 17, 1992·41 cites·23 claims
- 1075US5736301AMethod for patterning a photoresist material wherein an anti-reflective coating comprising a copolymer of bisphenol A and benzophenone is usedIBM·Filed 1996·Granted Apr 7, 1998·20 cites·3 claims
- 1153US5663036AMicrolithographic structure with an underlayer film comprising a thermolyzed azideIBM·Filed 1994·Granted Sep 2, 1997·11 cites·5 claims
- 1252US5783361AMicrolithographic structure with an underlayer film containing a thermolyzed azide compoundIBM·Filed 1997·Granted Jul 21, 1998·10 cites·11 claims
- 1351US5795701AMaking of microlithographic structures with an underlayer film containing a thermolyzed azide compoundIBM·Filed 1996·Granted Aug 18, 1998·12 cites·9 claims
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