Inventor · disambiguated record
Takuji Hayama
Also filed as: HAYAMA TAKUJI
10 granted patents·227 citations·filing 2000–2008
91Inventor score
Files withEBARA CORP10
Top patents by PatentIndex Score
10 records- 0193US6358128B1Polishing apparatusEBARA CORP·Filed 2000·Granted Mar 19, 2002·61 cites·70 claims
- 0292US7632378B2Polishing apparatusEBARA CORP·Filed 2005·Granted Dec 15, 2009·15 cites·12 claims
- 0392US6878044B2Polishing apparatusEBARA CORP·Filed 2004·Granted Apr 12, 2005·47 cites·18 claims
- 0489US6354922B1Polishing apparatusEBARA CORP·Filed 2000·Granted Mar 12, 2002·50 cites·29 claims
- 0583US6682408B2Polishing apparatusEBARA CORP·Filed 2001·Granted Jan 27, 2004·21 cites·24 claims
- 0677US7445543B2Polishing apparatusEBARA CORP·Filed 2004·Granted Nov 4, 2008·19 cites·21 claims
- 0770US7942725B2Polishing apparatusEBARA CORP·Filed 2008·Granted May 17, 2011·3 cites·13 claims
- 0863US6783427B2Polishing system with air exhaust systemEBARA CORP·Filed 2002·Granted Aug 31, 2004·9 cites·20 claims
- 0952US7270594B2Polishing apparatusEBARA CORP·Filed 2006·Granted Sep 18, 2007·0 cites·5 claims
- 1050US7156719B2Polishing apparatusEBARA CORP·Filed 2003·Granted Jan 2, 2007·2 cites·3 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →