Inventor · disambiguated record
Arnold Jan Van Putten
Also filed as: VAN PUTTEN ARNOLD JAN
4 granted patents·56 citations·filing 2009–2013
77Inventor score
Top patents by PatentIndex Score
4 records- 0193US8351018B2Fluid handling structure, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2009·Granted Jan 8, 2013·22 cites·19 claims
- 0291US8345218B2Immersion lithographic apparatus, drying device, immersion metrology apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2009·Granted Jan 1, 2013·14 cites·20 claims
- 0387US8421993B2Fluid handling structure, lithographic apparatus and device manufacturing methodDIRECKS DANIEL JOZEF MARIA·Filed 2009·Granted Apr 16, 2013·14 cites·20 claims
- 0484US9513566B2Lithographic apparatusASML NETHERLANDS BV·Filed 2013·Granted Dec 6, 2016·6 cites·19 claims
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