Inventor · disambiguated record
Douglas Broeke
Also filed as: BROEKE DOUGLAS VAN DEN
5 granted patents·127 citations·filing 2004–2007
83Inventor score
Top patents by PatentIndex Score
5 records- 0193US7247574B2Method and apparatus for providing optical proximity features to a reticle pattern for deep sub-wavelength optical lithographyASML MASKTOOLS BV·Filed 2004·Granted Jul 24, 2007·47 cites·22 claims
- 0291US7506299B2Feature optimization using interference mapping lithographyASML HOLDING NV·Filed 2004·Granted Mar 17, 2009·46 cites·30 claims
- 0387US7774736B2Method and apparatus for providing optical proximity features to a reticle pattern for deep sub-wavelength optical lithographyASML MASKTOOLS BV·Filed 2007·Granted Aug 10, 2010·8 cites·20 claims
- 0482US7594199B2Method of optical proximity correction design for contact hole maskASML MASKTOOLS BV·Filed 2004·Granted Sep 22, 2009·22 cites·13 claims
- 0574US7399559B2Optical proximity correction method utilizing phase-edges as sub-resolution assist featuresASML MASKTOOLS BV·Filed 2005·Granted Jul 15, 2008·4 cites·18 claims
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