Inventor · disambiguated record
Hee-Jeon Yang
Also filed as: YANG HEE-JEON
3 granted patents·2 pending applications·1 citations·filing 2004–2016
51Inventor score
Top patents by PatentIndex Score
5 records- 0152US9865474B2Etching method using plasma, and method of fabricating semiconductor device including the etching methodSAMSUNG ELECTRONICS CO LTD·Filed 2016·Granted Jan 9, 2018·0 cites·12 claims
- 0252US8404080B2Apparatus to treat a substrateJEON SANG-JEAN·Filed 2006·Granted Mar 26, 2013·1 cites·25 claims
- 0341US9520301B2Etching method using plasma, and method of fabricating semiconductor device including the etching methodKIM GO-JUN·Filed 2015·Granted Dec 13, 2016·0 cites·18 claims
- 0438US2005155555A1Semiconductor manufacturing apparatusFiled 2004·Application pending·0 cites
- 0532US2005027481A1System for making semiconductor devices and processing control thereofSAMSUNG ELECTRONICS CO LTD·Filed 2004·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →